University at Albany R&D Tool Installation
Liquid Nitrogen Distribution
MBE Growth Chamber
Molecular Beam Epitaxy (MBE)
Liebert Engineering provided detailed design, and construction management for the installation of a Molecular Beam Epitaxy (MBE) and a Scanning Tunneling Microscope (STM) for use in a semiconductor R&D facility at the SUNY campus in Albany, NY.
Specialty systems to support the installation included design and specification of an active vibration isolation table and a coaxial deep vacuum liquid nitrogen delivery system. Other services included room ventilation, supplemental cooling, power, HVAC controls, process cooling water, and high purity gasses including nitrogen and compressed air.